ISO/TS TECHNICAL SPECIFICATION 15338 Second edition 2020-02 Surface chemical analysis Glow discharge mass spectrometry - Operating procedures Analyse chimique des surfaces - Spectrometrie de masse a decharge luminescente (GD-MS)Introduction a I'utilisation Reference number IS0/TS15338:2020(E) ISO @IS02020 IS0/TS15338:2020(E) COPYRIGHTPROTECTEDDOCUMENT @IS02020 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting below orIso's member body in the country of therequester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone:+41227490111 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland i @IS0 2020 - All rights reserved IS0/TS15338:2020(E) Contents Page Foreword iv 1 Scope. 1 2 Normative references 1 3 Terms and definitions 1 4 Principle 1 5 Apparatus. 1 6 Routine operations 6 6.1 Cleaning the system. .6 6.2 Support gas handling 6 7 Calibration .7 7.1 Mass calibration. 7 7.2 Detector calibration. 7 7.3 Routine checks .8 8 Data acquisition. .9 8.1 Sample preparation .9 Procedure setup 9 8.2 8.3 Data acquiring 10 Quantification .10 9 9.1 Elementintegral calculation 10 9.2 Ion beam ratios. 11 9.3 Fully quantitative analysis 11 9.4 Semi quantitative analysis 12 9.5 Combination of semi quantitative and quantitative analysis 12 Bibliography .13 @ IS0 2020 - All rights reserved iii